Synonyms: Perfluoropropane, C3F8, Flutec PP30
CAS Number : 76-19-7
Description & Characteristics
Octafluoropropane, C3F8 is a fully-fluorinated, odourless, colourless compressed gas
Applications
Octafluoropropane is used extensively in semiconductor manufacture in etching processes and chemical vapour deposition (CVD) chamber cleaning to remove dielectric film build up. In a plasma with oxygen, it generates a variety of reactive species that breakdown chemical deposits to make volatile products, which are readily removed under vacuum. Its cleaning effect is comparable to that of C2F6, but with significantly lower gas usage (up to 50%), offering important economic and environmental advantages.
It is also used in contrast imaging applications and as an evaporative cooling fluid.
Specification
We tailor our product to our customer’s requirements and manufacture several grades of C3F8
Our standard grade is 99.96% min and we can achieve 99.999% min if required.
Packaging
