Synonyms: Perfluoropropane, C3F8, Flutec PP30
CAS Number : 76-19-7
Description & Characteristics
Octafluoropropane, C3F8 is a fully-fluorinated, odourless, colourless compressed gas.
Applications
Octafluoropropane is used extensively in semiconductor manufacture in etching processes and chemical vapour deposition (CVD) chamber cleaning to remove dielectric film build up. In a plasma with oxygen, it generates a variety of reactive species that breakdown chemical deposits to make volatile products, which are readily removed under vacuum. Its cleaning effect is comparable to that of C2F6, but with significantly lower gas usage (up to 50%), offering important economic and environmental advantages.
It is also used in contrast imaging applications and as an evaporative cooling fluid.
| Typical Physical Properties | |
| Molecular Weight | 188 |
| Boiling Point | -37℃ |
| Freezing Point | -183℃ |
| Vapour Pressure @ 21.1͍ | 792kPa |
| Absolute Density, Gas @ 101.325 kPa, 20℃ | 45.4 |
| Relative Density, Gas @ 101.325 kPa, 20℃ | 6.69 |
| Density Liquid @ Saturation Pressure, 20℃ | 1.352 kg/l |
| Critical Temperature | 71.9℃ |
| Critical Pressure | 2.680 MPa |
| Critical Volume | 1.590 dm3/kg |
| Critical Compressability Factor | 0.279 |
| Viscosity, Gas @ 101.325 kPa, 25℃ | 0.01454 mPa s |
| Typical Thermosphysical Properties | |
| Molar Specific Heat, Gas @ 101.325 kPa | 145.1 J/(mol.K) @10℃ - 156.0 J/(mol.K) @50℃ |
| Thermal Conductivity, Gas @ 101.325 kPa;25℃ | 0.0138 W/(m.K) |
| Latent Heat of Vaporisation | 19.7 kJ/mol @ -36.7℃ - 16.8 kJ/mol @ 0.0℃ |
| Heat Capacity, Ideal Gas @ 25℃ | 147.7 J/(mol.K) |
The above typical physical properties, in no way form or represent product specification
Click above button for print-ready product data sheet
